Electronic Specialty Gas Tube Trailers and Skids
Rein electronic specialty gas tube trailers and skids are engineered for the storage and transportation of high-purity gases used in semiconductor, integrated circuit, display and photovoltaic applications. The models listed on this page are configured for silane (SiH₄) service, with 8-cylinder and 12-cylinder options available for different transportation and supply requirements.
Inner-wall finishing and manufacturing controls are applied according to the specified gas medium and project requirements. Surface condition, cleanliness criteria, inspection scope and documentation should be confirmed for each order.
Inquire Now Key Technical Specifications
- Gas medium: SiH₄
- Working pressure: 16.6 MPa
- Cylinder configuration: 8 or 12 cylinders
- Total water volume: 8,800 or 13,200 L
- Nominal filling weight: 2,816 or 4,224 kg
- Configuration: Tube trailer or skid, subject to project confirmation
Technical Parameters of Electronic Specialty Gas Tube Skids
| Type | Body Material | Filling Medium | Working Pressure | Ambient Temperature | Cylinder Quantity | Cylinder Volume | Total Water Volume | Filling Factor | Filling Weight | Tare Weight | Overall Dimension |
|---|---|---|---|---|---|---|---|---|---|---|---|
| MPa | ℃ | L | L | Kg/L | Kg | Kg | mm (L*W*H) | ||||
| GSX08-1090-SiH4-16.6 | 4130X | SiH4 | 16.6 | -40 ～+60 | 8 | 1100 | 8800 | 0.32 | 2816 | 11550 | 6058*2438*1400 |
| GSX12-1090-SiH4-16.6 | 4130X | SiH4 | 16.6 | -40 ～+60 | 12 | 1100 | 13200 | 0.32 | 4224 | 16800 | 6058*2438*1980 |
| GSX08-2310-SiH4-16.6 | 4130X | SiH4 | 16.6 | -40 ～+60 | 8 | 2310 | 18480 | 0.32 | 5914 | 21500 | 12192*2438*1400 |
| GSX10-2310-SiH4-16.6 | 4130X | SiH4 | 16.6 | -40 ～+60 | 10 | 2310 | 23100 | 0.32 | 7392 | 27100 | 12192*2438*1980 |
| GSX08-1090-N2O-16.6 | 4130X | N2O | 16.6 | -40 ～+60 | 8 | 1100 | 8800 | 0.66 | 5808 | 11550 | 6058*2438*1400 |
| GSX10-1090-N2O-16.6 | 4130X | N2O | 16.6 | -40 ～+60 | 10 | 1100 | 11000 | 0.66 | 7260 | 14500 | 6058*2438*1900 |
| GSX12-1090-N2O-16.6 | 4130X | N2O | 16.6 | -40 ～+60 | 12 | 1100 | 13200 | 0.66 | 8712 | 16800 | 6058*2438*1980 |
| GSX12-1120-N2O-16.6 | 4145 | N2O | 16.6 | -40 ～+60 | 12 | 1120 | 13440 | 0.66 | 8870 | 13600 | 6058*2438*1980 |
| GSX08-1090-NF3-16.6 | 4130X | NF3 | 16.6 | -40 ～+60 | 8 | 1100 | 8800 | 0.56 | 4928 | 11550 | 6058*2438*1400 |
| GSX12-1090-NF3-16.6 | 4130X | NF3 | 16.6 | -40 ～+60 | 12 | 1100 | 13200 | 0.56 | 7392 | 16800 | 6058*2438*1980 |
| GSX08-2310-NF3-16.6 | 4130X | NF3 | 16.6 | -40 ～+60 | 8 | 2310 | 18480 | 0.56 | 10349 | 21500 | 12192*2438*1400 |
| GSX10-1090-HCL-16.6 | 4130X | HCl | 16.6 | -40 ～+60 | 10 | 1100 | 11000 | 0.65 | 7150 | 14435 | 6058*2438*1900 |
| GSX06-2310-HCL-16.6 | 4130X | HCl | 16.6 | -40 ～+60 | 6 | 2310 | 13860 | 0.65 | 9009 | 16700 | 12192*2438*1400 |
| GSX05-2310-HCL-16.6 | 4130X | HCl | 16.6 | -40 ～+60 | 5 | 2310 | 11550 | 0.65 | 7508 | 14620 | 12192*2438*1400 |
| GSX08-2310-HCL-16.6 | 4130X | HCl | 16.6 | -40 ～+60 | 8 | 2310 | 18480 | 0.65 | 12012 | 21500 | 12192*2438*1400 |
| GSX08-1090-CF4-16.6 | 4130X | CF4 | 16.6 | -40 ～+60 | 8 | 1100 | 8800 | 0.65 | 5720 | 11550 | 6058*2438*1400 |
| GSX12-1090-CF4-16.6 | 4130X | CF4 | 16.6 | -40 ～+60 | 12 | 1100 | 13200 | 0.65 | 8580 | 16800 | 6058*2438*1980 |
| GSX12-1120-CF4-16.6 | 4145 | CF4 | 16.6 | -40 ～+60 | 12 | 1120 | 13440 | 0.65 | 8736 | 13600 | 6058*2438*1980 |
| GSX12-1120-SF6-16.6 | 4145 | SF6 | 16.6 | -40 ～+60 | 12 | 1120 | 13440 | 1.38 | 18547 | 13600 | 6058*2438*1980 |
| GSX12-1090-PH3MTF-16.6 | 4130X | PH3M-TF | 16.6 | -40 ～+60 | 12 | 1100 | 13200 | 0.0373 | 492 | 16800 | 6058*2438*1980 |
| GSX06-2375-C2H2F2-16.6 | 4130X | C2H2F2 | 16.6 | -40 ～+60 | 6 | 2375 | 14250 | 0.7 | 9975 | 14000 | 12192*2438*1400 |
| GSX06-2310-C2H2F2-16.6 | 4130X | C2H2F2 | 16.6 | -40 ～+60 | 6 | 2310 | 13860 | 0.7 | 9702 | 16950 | 12192*2438*1400 |
| GSX07-3000-C2H2F2-16.6 | 4130X | C2H2F2 | 16.6 | -40 ～+60 | 6 | 3000 | 18000 | 0.7 | 12600 | 19760 | 12192*2438*2000 |
Values shown are standard model data for reference. Final gas compatibility, allowable filling quantity, valve and connection configuration, applicable code and documentation shall be confirmed according to the gas medium, destination market and project requirements.
What Is an Electronic Specialty Gas Tube Trailer or Skid?
An electronic specialty gas tube trailer or skid integrates multiple large-volume pressure cylinders, piping, valves and supporting structures into one transportable gas packaging unit. It is used where individual cylinders or smaller packages cannot efficiently meet the required gas inventory, delivery frequency or supply demand.
For semiconductor and electronics projects, equipment selection must consider not only pressure and capacity, but also gas compatibility, internal cleanliness, connection design, unloading conditions, destination regulations and the required quality documentation.
Why Purity Preservation Matters
Electronic specialty gases used in semiconductor, integrated circuit, display and photovoltaic manufacturing require careful contamination control throughout storage and transportation. Moisture, oxygen, particles or residues inside the cylinder and gas-contact components may affect gas quality and downstream processes.
Rein applies inner-wall grinding and manufacturing controls to help manage the internal surface condition of the gas cylinders. The cleaning, drying, assembly and inspection requirements should be confirmed according to the gas medium, required purity grade and project specification.
When evaluating an electronic specialty gas tube trailer or skid, buyers should review:
- Internal surface treatment and cleanliness requirements
- Residual moisture and oxygen acceptance criteria
- Compatibility of cylinders, valves, seals and piping with the filling medium
- Cleaning, drying and purging procedures
- Leak and pressure testing requirements
- Material certificates and inspection records
- Protection against contamination during transportation and connection
For SiH₄ service, the final configuration and acceptance criteria should be reviewed according to the required gas purity, operating conditions, filling and unloading interface, destination regulations and applicable project standards.
Tube Trailer vs Tube Skid vs Y-Ton Cylinder
| Selection Factor | Tube Trailer | Tube Skid | Y-Ton Cylinder |
|---|---|---|---|
| Mobility | Integrated with a road trailer | Transportable frame; chassis arranged separately | Compact individual package |
| Typical capacity | Higher-volume transport | Storage, transport or site supply | Smaller-volume or flexible supply |
| Site arrangement | Requires vehicle access and unloading space | Requires handling and installation planning | Easier to handle in smaller supply systems |
| Selection basis | Route, payload, regulations and unloading | Site layout, lifting and system interface | Consumption, changeover frequency and handling |
| Final configuration | Project-specific | Project-specific | Project-specific |
Packaging format should be selected according to usable gas quantity, supply continuity, available site space, unloading interface, changeover frequency and destination requirements—not capacity alone.
Applications
- Semiconductor wafer fabrication
- Integrated circuit manufacturing
- LED and display panel production
- Photovoltaic manufacturing
- Industrial high-purity gas logistics
Customer-Centric Excellence in Service
After-sales services
After-sales services
Rein's service network spans nationwide, ensuring we are always nearby.
24/7 service hotline: 400-636-7011
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Quality information inquiry
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